Semiconductor Fab Explorer | 3D Engineering Explorer

STATION 06Lithography

DUV / EUV Lithography Scanner

Projection lithography scannerLithography bay · vibration controlled

The scanner aligns the wafer to existing layers and projects a reticle pattern into photoresist. Critical layers may use EUV while many other layers use DUV lithography.

Separate process modules, screws, nuts and washers. Illustrative architecture, not a service manual.

Current manufacturing operation06 · Alignment, focus & lithography exposure

Patterning

Align to prior-layer marks, level the wafer, control focus and dose, and expose the reticle pattern field-by-field using the lithography technology assigned to the mask level.

Wafer stateLatent resist image registered to previous layers

Reticle verificationAlignment / overlayFocus-level mapDose / exposure

↻ Production wafers return to lithography for many mask levels; some layers may use different exposure technologies.

Why this tool matters

Overlay and pattern fidelity determine whether successive device layers line up correctly. Lithography is repeated many times as transistor and interconnect layers are constructed.

Inputs

Coated wafer
Reticle
Exposure and alignment recipe

Outputs

Exposed resist image
Alignment / scanner metrology data

Process conditionsCritical control points

Equipment architectureHigh-volume manufacturing reference

HVM

Large vibration-isolated lithography scanner with reticle handling, projection optics, precision wafer stage, environmental control, and load-port interface.

Wafer handlingWafers arrive from the track and are aligned, leveled, exposed field-by-field, then returned for post-exposure bake/develop.

AutomationStage motion, alignment, focus/level, dose control, reticle handling, environmental conditioning, and exposure sequencing are synchronized at high speed.

Typical modulesFacility hookupsSafety / permissives

DIGITAL FAB READY15 physical stations · 34 route operationsHVM-inspired tool architecture · animated process behavior · procedural PBR 3D

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